About this scholarly article

7th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems - Application of an Innovative Method for the Fatigue Characterisation of 15 μm Thick Epitaxial Polysilicon by Ferraris, E.; Fassi, I.; Del Sarto, M. is a scholarly article available to read on EtoBox.

Author

Ferraris, E.; Fassi, I.; Del Sarto, M.

Publisher

IEEE

Published

2006

Language

EN