About this scholarly article

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Design for Manufacturability through Design-Process Integration III - Directional 2D functions as models for fast layout pattern transfer verification by Singh, Vivek K.; Torres, J. Andres; Hofmann, Mark; Rieger, Michael L.; Otto, Oberdan is a scholarly article available to read on EtoBox.

Author

Singh, Vivek K.; Torres, J. Andres; Hofmann, Mark; Rieger, Michael L.; Otto, Oberdan

Publisher

SPIE

Published

2009

Language

EN