About this document
Mechanical Properties of MEMS Materials by Nico Ortega Miranda is a document available to read on EtoBox.
This document discusses the mechanical properties of materials used in microelectronic and mechanical systems (MEMS). It states that the mechanical properties of MEMS materials need to be accurately evaluated since they differ from bulk material properties and impact device performance and reliability. The key mechanical properties discussed are elastic properties like Young
- Author
- Nico Ortega Miranda
- Language
- EN