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About this Engineering article
Etch Rate Profile Characterization of High-κ Materials by Votta, Annamaria; Bellandi, Enrico; Piagge, Rosella; Caniatti, Massimo; Pipia, Francesco; Alessandri, Mauro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Votta, Annamaria; Bellandi, Enrico; Piagge, Rosella; Caniatti, Massimo; Pipia, Francesco; Alessandri, Mauro
- Publisher
- Trans Tech Publications, Ltd.; Scientific.net; Scitec Publications Ltd. (ISSN 1662-9779)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)