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About this Engineering article
Effects of Pre-Gate Oxidation Cleaning and Gettering Upon The Very Thin Oxide Integrity by Lee, J.; Tung, C. Y.; Hahn, S.; Chiao, P. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Lee, J.; Tung, C. Y.; Hahn, S.; Chiao, P.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1986
- Language
- EN
- Field
- Engineering (Physical Sciences)
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