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About this Engineering article
Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM by Lorenzoni, Matteo; Llobet, Jordi; Gramazio, Federico; Sansa, Marc; Fraxedas, Jordi; Perez-Murano, Francesc is a Engineering article available to read on EtoBox.
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- Author
- Lorenzoni, Matteo; Llobet, Jordi; Gramazio, Federico; Sansa, Marc; Fraxedas, Jordi; Perez-Murano, Francesc
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics; AVS Science and Technology Society (ISSN 1520-8567)
- Published
- 2016
- Field
- Engineering (Physical Sciences)