About this scholarly article

SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Direct femtosecond laser writing system for sub-micron and micron scale patterning by Vanagas, Egidijus; Tuzhilin, Dmitry; Zinkou, Michail; Sedunov, Alexander; Vasiliev, Nikolai; Kudryashov, Igor; Kononov, Vladimir; Suruga, Shozi; Miyamoto, Isamu; Ostendorf, Andreas; Sugioka, Koji; Helvajian, Henry is a scholarly article available to read on EtoBox.

Author

Vanagas, Egidijus; Tuzhilin, Dmitry; Zinkou, Michail; Sedunov, Alexander; Vasiliev, Nikolai; Kudryashov, Igor; Kononov, Vladimir; Suruga, Shozi; Miyamoto, Isamu; Ostendorf, Andreas; Sugioka, Koji; Helvajian, Henry

Publisher

SPIE

Published

2003