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Can I read SU-8 cantilever sensor system with integrated readout on EtoBox?
SU-8 cantilever sensor system with integrated readout by A. Johansson; M. Calleja; P.A. Rasmussen; A. Boisen is a Engineering article available to read on EtoBox.
What is SU-8 cantilever sensor system with integrated readout about?
We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols.
Who reads SU-8 cantilever sensor system with integrated readout?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- A. Johansson; M. Calleja; P.A. Rasmussen; A. Boisen
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)