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About this Engineering article
Surface Micromachined Mirror Based on Pre-Stress Comb-Drive Actuator by Wang, Wei Min; Yan, Sheng Mei; Wang, Qiang; Qiu, Chuan Kai; Chen, Ze Xiang; Fan, Bin is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Wang, Wei Min; Yan, Sheng Mei; Wang, Qiang; Qiu, Chuan Kai; Chen, Ze Xiang; Fan, Bin
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9795)
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)