About this scholarly article

SPIE Proceedings [SPIE 27th Annual Techincal Symposium - San Diego (Tuesday 23 August 1983)] X-Ray Lithography and Applications of Soft X-Rays to Technology - Synchrotron Radiation X-Ray Lithography: Recent Results by Silverman, Jerome P.; Haelbich, Rolf P.; Warlaumont, John M.; Wilson, Alan D. is a scholarly article available to read on EtoBox.

Author

Silverman, Jerome P.; Haelbich, Rolf P.; Warlaumont, John M.; Wilson, Alan D.

Publisher

SPIE

Published

1984