About this scholarly article

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - A preliminary study on friction measurements in MEMS by Deng, K.; Ko, W.H.; Michal, G.M. is a scholarly article available to read on EtoBox.

Author

Deng, K.; Ko, W.H.; Michal, G.M.

Publisher

IEEE

Published

1991