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About this Materials Science article
Optical properties and chemical bonding characteristics of amorphous SiNX:H thin films grown by the plasma enhanced chemical vapor deposition method by Yin He; Yuanzhe Wang; Wang Li; Weizhi Han; Zhijuan Hu; Xiaomei Qin; Guoping Du; Wangzhou Shi is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Yin He; Yuanzhe Wang; Wang Li; Weizhi Han; Zhijuan Hu; Xiaomei Qin; Guoping Du; Wangzhou Shi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-3093)
- Published
- 2012
- Field
- Materials Science (Physical Sciences)