Opening book details…
About this Engineering article
Simple Method of Correcting Optical Proximity Effect for0.35 μmLogic LSI Circuits by E. Kawamura; T. Haruki; Y. Manabe; I. Hanyu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- E. Kawamura; T. Haruki; Y. Manabe; I. Hanyu
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1995
- Field
- Engineering (Physical Sciences)
More by E. Kawamura; T. Haruki; Y. Manabe; I. Hanyu
Browse all works by E. Kawamura; T. Haruki; Y. Manabe; I. Hanyu