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About this Engineering article
An Experimental Study on Semiconductor Process Chiller Using the Digital Scroll Compressor by Dong An Cha,Oh Kyung Kwon,Myung Do Oh is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Dong An Cha,Oh Kyung Kwon,Myung Do Oh
- Publisher
- Springer-Verlag; Korean Society of Mechanical Engineers; Springer Science and Business Media LLC (ISSN 1738-494X)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)