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Defect Engineering by Surface Chemical State in Boron-doped Preamorphized Silicon by S. H. Yeong; M. P. Srinivasan; B. Colombeau; L. Chan; R. Akkipeddi; C. T. M. Kwok; R. Vaidyanathan; E. G. Seebauer is a Engineering article available to read on EtoBox.

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Author
S. H. Yeong; M. P. Srinivasan; B. Colombeau; L. Chan; R. Akkipeddi; C. T. M. Kwok; R. Vaidyanathan; E. G. Seebauer
Publisher
American Institute of Physics; AIP Publishing (ISSN 0003-6951)
Published
2007
Language
EN
Field
Engineering (Physical Sciences)

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