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About this Engineering article
Thin film silicon MEMS microresonators fabricated by hot-wire chemical vapor deposition by Patil, Samadhan B; Adrega, T; Chu, V; Conde, J P is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Patil, Samadhan B; Adrega, T; Chu, V; Conde, J P
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing; ScienceOpen (ISSN 0960-1317)
- Published
- 2006
- Field
- Engineering (Physical Sciences)
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