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About this Engineering article
Synthesis of Silicon Dioxide Film Using High-concentration Ozone and Evaluation of the Film Quality by Kunihiko Koike; Koichi Izumi; Sadaki Nakamura; Goichi Inoue; Akira Kurokawa; Shingo Ichimura is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kunihiko Koike; Koichi Izumi; Sadaki Nakamura; Goichi Inoue; Akira Kurokawa; Shingo Ichimura
- Publisher
- Springer US; Springer-Verlag; Springer New York LLC; Springer Science and Business Media LLC (ISSN 0361-5235)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)