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About this Engineering article
Dependence of Epitaxial Layer Defect Morphology on Substrate Particle Contamination of Si Epitaxial Wafer by Iwabuchi, M.; Mizushima, K.; Mizuno, M.; Kitagawara, Y. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Iwabuchi, M.; Mizushima, K.; Mizuno, M.; Kitagawara, Y.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)
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