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About this Engineering article
Monolithic Design of a Compliant Template Orientation Stage for Step Imprint Lithography by Shao, J.-Y.; Ding, Y.-C.; Liu, H.-Z.; Li, X.-M.; Tian, H.-M.; Xiao, B.-H. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Shao, J.-Y.; Ding, Y.-C.; Liu, H.-Z.; Li, X.-M.; Tian, H.-M.; Xiao, B.-H.
- Publisher
- SAGE Publications; SAGE Publications Inc. (ISSN 0954-4054)
- Published
- 2011
- Language
- EN
- Field
- Engineering (Physical Sciences)
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