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About this Engineering article
Intermittence Effect in Electron Beam Writing by L.-Chr. Wittig; M. Cumme; T. Harzendorf; E.-B. Kley is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- L.-Chr. Wittig; M. Cumme; T. Harzendorf; E.-B. Kley
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2001
- Language
- EN
- Field
- Engineering (Physical Sciences)