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About this scholarly article
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Thin-film paddle microresonators with high quality factors fabricated at temperatures below 110° C by Gaspar, J.; Adrega, T.; Chu, V.; Conde, J.P. is a scholarly article available to read on EtoBox.
- Author
- Gaspar, J.; Adrega, T.; Chu, V.; Conde, J.P.
- Publisher
- IEEE
- Published
- 2005
- Language
- EN
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