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About this Engineering article
Formation of Mn Oxide with Thermal CVD and its Diffusion Barrier Property Between Cu and SiO2 by Neishi, Koji; Aki, Shiro; Iijima, Jun; Koike, Junichi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Neishi, Koji; Aki, Shiro; Iijima, Jun; Koike, Junichi
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2008
- Field
- Engineering (Physical Sciences)
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