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About this Engineering article

Formation of Mn Oxide with Thermal CVD and its Diffusion Barrier Property Between Cu and SiO2 by Neishi, Koji; Aki, Shiro; Iijima, Jun; Koike, Junichi is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Neishi, Koji; Aki, Shiro; Iijima, Jun; Koike, Junichi
Publisher
Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
Published
2008
Field
Engineering (Physical Sciences)

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