About this scholarly article

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Ion-plasma surface polishing in HF-reactors by Azarenkov, N.A.; Bizykov, A.A. is a scholarly article available to read on EtoBox.

Author

Azarenkov, N.A.; Bizykov, A.A.

Publisher

IEEE

Published

1996