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Can I read Optimizing Precision of Rotating Compensator Ellipsometry on EtoBox?
Optimizing Precision of Rotating Compensator Ellipsometry by L. Broch; L. Johann is a Engineering article available to read on EtoBox.
What is Optimizing Precision of Rotating Compensator Ellipsometry about?
## Abstract We present a method especially adapted to the RCE ellipsometer in the PCSA configuration (Polarizer, Compensator, Sample, Analyzer) when measurements with high degree of accuracy are required. The optimum precision conditions can be achieved for any sample by an adjustement of the azimuth of the analyzer and the polarizer. This new method of tracking is used to minimize the random errors and new positions of the analyzer and the polarizer according the sample are given. In these cases, the variances of tan __Ψ__ and tan __Δ__ can be divided up to five. Experimental verification of error reductions is also achieved. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Who reads Optimizing Precision of Rotating Compensator Ellipsometry?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- L. Broch; L. Johann
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); Wiley - V C H Verlag GmbbH & Co.; Wiley (ISSN 1862-6351)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)