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About this Engineering article
Fabrication of SiC microelectromechanical systems using one-step dry etching by L. Jiang; R. Cheung; M. Hassan; A. J. Harris; J. S. Burdess; C. A. Zorman; M. Mehregany is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- L. Jiang; R. Cheung; M. Hassan; A. J. Harris; J. S. Burdess; C. A. Zorman; M. Mehregany
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2003
- Field
- Engineering (Physical Sciences)