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What is Sheet Resistance Testing of Thin Films about?

The document outlines the ASTM F 390 – 98 standard test method for measuring the sheet resistance of thin metallic films using a collinear four-probe array. It specifies the scope, terminology, apparatus, and procedures necessary for accurate measurement, including safety considerations and equipment requirements. The method is applicable for both referee and routine acceptance measurements of metallic films with specific thickness and resistivity ranges.

Author

septhiadi

Language

EN