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This document summarizes the fabrication and characterization of a polycrystalline 3C-SiC piezoresistive micro-pressure sensor for extreme environment applications. The sensor was fabricated using chemical vapor deposition to grow a 0.5-micron thick poly-3C-SiC thin film on an oxidized silicon-on-insulator wafer. Piezoresistors were patterned on the film and electrodes were deposited. The sensor was packaged and its pressure sensitivity, nonlinearity, hysteresis, and temperature characteristics were evaluat

Author

mala s

Language

EN