Can I read Microlithography : Science and Technology on EtoBox?

Microlithography : Science and Technology by Bruce W. Smith (Editor), Kazuaki Suzuki (Editor) is a nonfiction available to read on EtoBox.

What is Microlithography : Science and Technology about?

The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world's leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.New in the Third EditionIn addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New a

Who reads Microlithography : Science and Technology?

Author

Bruce W. Smith (Editor), Kazuaki Suzuki (Editor)

Publisher

CRC Press, Taylor et Francis Group

Published

2020

Language

EN

ISBN

9781032836737

Category

nonfiction

Subjects

Engineering, Stem