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About this Engineering article
A structural study of polycrystalline AlN films prepared by ion-beam-assisted deposition by J. Yang; C. Wang; X. Yan; K. Tao; Y. Fan is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. Yang; C. Wang; X. Yan; K. Tao; Y. Fan
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 1994
- Field
- Engineering (Physical Sciences)
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