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What is High-Frequency Temperature-Compensated Resonators about?
This document presents a high-frequency, temperature-compensated micromechanical resonator designed to minimize frequency shifts due to temperature changes, achieving a temperature coefficient of -2.5 ppm/°C and a quality factor (Q) greater than 10,000. The resonator utilizes a novel mechanical support structure that enhances thermal stability and reduces energy loss, making it suitable for on-chip high-Q reference oscillator applications. Experimental results demonstrate significant improvements over previ
- Author
- Suaid Tariq
- Language
- EN