About this scholarly article

SPIE Proceedings [SPIE Eighth International Conference on Thin Film Physics and Applications (TFPA13) - Shanghai, China (Friday 20 September 2013)] Eighth International Conference on Thin Film Physics and Applications - Study on the fabrication and releasing of sacrificial layer of micro-cantilever by Liu, Liang; Liu, Weiguo; Liu, Huan; Chu, Junhao; Wang, Chunrui is a scholarly article available to read on EtoBox.

Author

Liu, Liang; Liu, Weiguo; Liu, Huan; Chu, Junhao; Wang, Chunrui

Publisher

SPIE

Published

2013