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About this Engineering article

INVESTIGATION OF SI-AlTiC WAFER BONDING USING SU-8 by WEE, C. T.; LU, Y; YANG, J. P. is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
WEE, C. T.; LU, Y; YANG, J. P.
Publisher
World Scientific Publishing Company; World Scientific ; Imperial College Press; World Scientific Pub Co Pte Lt (ISSN 1465-8763)
Published
2003
Field
Engineering (Physical Sciences)

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