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About this Engineering article
Ultra Shallow Junction Formation by Cluster Ion Implantation by Matsuo, Jiro; Aoki, Takaaki; Goto, Ken-ichi; Sugii, Toshihiro; Yamada, Isao is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Matsuo, Jiro; Aoki, Takaaki; Goto, Ken-ichi; Sugii, Toshihiro; Yamada, Isao
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)
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