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Atomic layer deposition and tellurization of Ge–Sb film for phase-change memory applications by Yewon Kim & Byeol Han & Yu-Jin Kim & Jeeyoon Shin & Seongyoon Kim & Romel Hidayat & Jae-Min Park & Wonyong Koh & Won-Jun Lee is a book available to read on EtoBox.

Author
Yewon Kim & Byeol Han & Yu-Jin Kim & Jeeyoon Shin & Seongyoon Kim & Romel Hidayat & Jae-Min Park & Wonyong Koh & Won-Jun Lee
Publisher
Royal Society of Chemistry
Language
EN