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Lanthanum Glyme Complexes for CVD by Hồng Thùy is a document available to read on EtoBox.

What is Lanthanum Glyme Complexes for CVD about?

The document discusses the synthesis and characterization of lanthanum â-diketonate glyme complexes, which serve as volatile precursors for metal-organic chemical vapor deposition (MOCVD) applications. The study reveals the thermal stability and mass transport properties of these complexes, demonstrating their potential for depositing high-quality lanthanum-based films. The findings indicate that these new precursors are advantageous compared to conventional lanthanide precursors due to their improved volat

Author
Hồng Thùy
Language
EN