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About this Engineering article
Improving Critical Dimension Accuracy and Throughput by Subfield Scheduling in Electron Beam Mask Writing by S. Babin; A. B. Kahng; I. I. Măndoiu; S. Muddu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- S. Babin; A. B. Kahng; I. I. Măndoiu; S. Muddu
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)
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