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Dual-mode Behavior of Vinyl Ether Functionalized Photoresist. by YAMAOKA, Tsuguo; KAMENOSONO, Kouji; MOON, Seongyun; NAITOH, Kazuhiko; KONDO, Syun-ichi; UMEHARA, Akira is a Engineering article available to read on EtoBox.

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Author
YAMAOKA, Tsuguo; KAMENOSONO, Kouji; MOON, Seongyun; NAITOH, Kazuhiko; KONDO, Syun-ichi; UMEHARA, Akira
Publisher
Japan Science and Technology Information Aggregator, Electronic; The Technical Association of Photopolymers, Japan; Technical Association of Photopolymers; Technical Association of Photopolymers, Japan (ISSN 0914-9244)
Published
1994
Field
Engineering (Physical Sciences)

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