Can I read Lecture Notes on Principles of Plasma Processing on EtoBox?

Lecture Notes on Principles of Plasma Processing by Francis F. Chen, Jane P. Chang, Francis F. Chen is a nonfiction available to read on EtoBox.

What is Lecture Notes on Principles of Plasma Processing about?

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. The included CD contains a copy of the book which can be indexed usi

Who reads Lecture Notes on Principles of Plasma Processing?

Author

Francis F. Chen, Jane P. Chang, Francis F. Chen

Publisher

Springer US : Imprint: Springer

Published

2003

Language

EN

ISBN

9781461501817

Category

nonfiction

Subjects

Science, Technology, Chemistry