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About this Engineering article
Changes in the Phase Structure and Formation of Chemical Compounds by Ion Implantation of Tantalum Thin Films by I.H. Wilson; K.H. Goh; K.G. Stephens is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- I.H. Wilson; K.H. Goh; K.G. Stephens
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1976
- Field
- Engineering (Physical Sciences)