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Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry by Jayachandran, Suseendran; Delabie, Annelies; Billen, Arne; Dekkers, Harold; Douhard, Bastien; Conard, Thierry; Meersschaut, Johan; Caymax, Matty; Vandervorst, Wilfried; Heyns, Marc is a Materials Science article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Materials Science.

Author
Jayachandran, Suseendran; Delabie, Annelies; Billen, Arne; Dekkers, Harold; Douhard, Bastien; Conard, Thierry; Meersschaut, Johan; Caymax, Matty; Vandervorst, Wilfried; Heyns, Marc
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
Published
2015
Field
Materials Science (Physical Sciences)