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Chapter 3 discusses the process of creating and transferring patterns onto substrates using photolithography, an optical printing technique. It emphasizes the importance of cleanliness in microfabrication, particularly in clean rooms, and details the application and characteristics of photoresist materials used in the process. The chapter also covers the exposure and pattern transfer steps, highlighting the significance of UV light wavelengths in achieving high-resolution patterns.

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doweja6586

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EN