Can I read Automated Assembly of Flip-up Micromirrors on EtoBox?

Automated Assembly of Flip-up Micromirrors by J. Robert Reid; Victor M. Bright; J.T. Butler is a Engineering article available to read on EtoBox.

What is Automated Assembly of Flip-up Micromirrors about?

Batch fabrication of microelectromechanical systems utilizing Hip-up microstructures is limited by the manual assembly process required to lift the structure> off the substrate. This problem is solved with the use of an automated assembly system integrated on the die with the flipup structures. A microelectromechanical automated assembly system consisting of a vertical thermal actuator, a linear assembly micromotor, and a self-engaging locking mechanism is presented in this paper. The vertical thermal actuator is used to lift one end of the plate off the substrate. This provides the linear assembly micromotor with the leverage needed to push the plate up into a position where the self-engagini locking mechanism secures the plate. A CMOS drive system has been developed to control the automated assembly system. When combined with the automated assembly system, CMOS control allows flip-up microstructures to be assembled without any operator intervention. The automated assembly system is demonstrated with a scanning micromirror and a corner cube reflector.

Who reads Automated Assembly of Flip-up Micromirrors?

Author

J. Robert Reid; Victor M. Bright; J.T. Butler

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)

Published

1998

Language

EN

Field

Engineering (Physical Sciences)