About this scholarly article

2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) - Characterization of low-temperature SU-8 photoresist processing for MEMS applications by Sang Jeen Hong, ; Seungkeun Choi, ; Yoonsu Choi, ; Allen, M.; May, G.S. is a scholarly article available to read on EtoBox.

Author

Sang Jeen Hong, ; Seungkeun Choi, ; Yoonsu Choi, ; Allen, M.; May, G.S.

Publisher

IEEE

Published

2004