About this scholarly article

1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - AlN film growth under N/sub 2//sup +/ ion bombardment onto Al surface by Mitsuhashi, R.; Beag, Y.W.; Zhou, G.; Shimizu, R. is a scholarly article available to read on EtoBox.

Author

Mitsuhashi, R.; Beag, Y.W.; Zhou, G.; Shimizu, R.

Publisher

IEEE

Published

1998

Language

EN