About this scholarly article

2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Sub-10 nm silicon FinFET devices on SOI substrate made by block copolymer lithography by Li, Dong-Xue; Chien, Chien-Liang; Wei, Xinnian; Huang, Yanwei; Qu, Xin-Ping; Chang, Tzu-Hsuan; Xiong, Shisheng is a scholarly article available to read on EtoBox.

Author

Li, Dong-Xue; Chien, Chien-Liang; Wei, Xinnian; Huang, Yanwei; Qu, Xin-Ping; Chang, Tzu-Hsuan; Xiong, Shisheng

Publisher

IEEE

Published

2018

Language

EN