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About this book
Electron Beam X-ray And Ion Beam Submicrometer Lithographies For Manufacturing Iii (proceedings by David O. Patterson, chair/editor; sponsored and published by SPIE--the International Society for Optical Engineering is a book available to read on EtoBox.
- Author
- David O. Patterson, chair/editor; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
- Society of Photo-optical Instrumentation Engineers
- Published
- 1993
- Language
- EN
- ISBN
- 9780819411587
- Subjects
- Engineering, Stem
More by David O. Patterson, chair/editor; sponsored and published by SPIE--the International Society for Optical Engineering
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