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About this Engineering article
Preparation and characterization of hydrogenated diamond-like carbon films in a dual DC-RF plasma system by Li, Hongxuan; Xu, Tao; Chen, Jianmin; Zhou, Huidi; Liu, Huiwen is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Li, Hongxuan; Xu, Tao; Chen, Jianmin; Zhou, Huidi; Liu, Huiwen
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0022-3727)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)
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