About this scholarly article

SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Integrated Optics and Microstructures III - All-silicon waveguides and bulk-etched alignment structures on (110) silicon for integrated micro-opto-mechanical systems by Smith, Steven W.; Mehregany, Mehran; Merat, Francis L.; Smith, David A.; Tabib-Azar, Massood is a scholarly article available to read on EtoBox.

Author

Smith, Steven W.; Mehregany, Mehran; Merat, Francis L.; Smith, David A.; Tabib-Azar, Massood

Publisher

SPIE

Published

1996

Language

EN