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About this Engineering article
Defect evolution in MeV ion-implanted silicon by J. Lalita; N. Keskitalo; A. Hallén; C. Jagadish; B.G. Svensson is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. Lalita; N. Keskitalo; A. Hallén; C. Jagadish; B.G. Svensson
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 1996
- Field
- Engineering (Physical Sciences)