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This study presents a cost-effective method for producing high-quality silicon nitride (Si3N4) powders from silicon scrap through direct nitridation, addressing the issue of silicon waste in the semiconductor industry. The optimization of ball milling parameters using ethanol resulted in fine-micron sized silicon powders, which were nitrided at 1450 °C, achieving a 90.1% conversion rate to Si3N4 with 85% in the α-phase. This approach not only enhances the recycling of silicon waste but also reduces environm

Author

24130008

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EN